Quattrone Nanofabrication Equipment / Instrumentation

Nanoscale Characterization Equipment / Instrumentation

Scanning and Local Probe Equipment / Instrumentation

Agilent AFM


  • Contact, tapping, lateral force, force spectroscopy, scanning Kelvin probe, MAC and Top MAC

Environmental control

  • Ambient, purged gas, fluid environments with heated and cooled stages

Applications: Controlled-environment AFM (fluid, purged gas, temperature- programmed). Polymers, electrochemistry, force spectroscopy. Magnetically-excited AFM.

Scan range

  • 90μm × 90 μm × 7 μm closed-loop scanner
  • 9 μm × 9 μm × 2 μm open loop scanner

Noise floor

  • <5 Å (large scanner)
  • <1 Å (small scanner)


  • Ten 16-bit channels input
  • Four 24-bit channels out


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Asylum AFM

Modes available

  • Contact, AC (tapping) and Dual AC, 1-D forces, lateral force, nanolithography, Electrostatic Force, Kelvin probe, conductive AFM, Magnetic Force, piezoelectric force, thermal AFM


  • Stiffness and adhesion measurements, frictional force imaging. Nanolithography, electrostatic force microscopy, and scanning surface potential. Conductive AFM, magnetic and piezoresponse force microscopy.

Scan range

  • 90μm × 90μm × 15μm closed loop

Z noise

  • <0.06nm 0.1Hz-1kHz BW

Cantilever noise

  • <0.02nm Adev, 0.1Hz-1kHz BW.

Analog to Digital Converters

  • One 16-bit, 5 MHz channel

Digital to Analog Converters

  • Five 16-bit 100kHz channel

Direct Digital Synthesizer

  • Six 24-bit 100kHz channels, plus two 10-bit 10MHz summed on a single DAC
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Bruker Icon AFM

AFM modes

  • PeakForce (with quantitative nanomechanics), tapping, contact, lateral force, magnetic force spectroscopy, Kelvin probe, conductive AFM, tunneling AFM, electrostatic force, magnetic force, piezoelectric force, torsional resonance mode.

Applications: Nano-mechanics, whole-wafer inspection, scanning conductivity/resistance microscopy. Thermal AFM. Electrical measurements of soft materials. Fluid tipholder.

X-Y scan range

  • 90μm × 90 μm × 10 μm

Vertical noise floor

  • <30 pm RMS

Current sensitivity

  • pA to μA

Motorized position stage (X-Y axis)

  • 180mm × 150mm
  • 210mm vacuum chuck
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Horiba Raman & AFM


  • Raman spectroscopy and photoluminescence in transmission and reflection modes. Scanning sample stage for mapping of optical properties
  • Side-illumination for integrated contact and tapping AFM, scanning surface potential, and tip-enhanced Raman spectroscopy.
  • Cryogenic vacuum sample holder with electrical feedthroughs.
  • 405 nm, 600nm, and 785nm laser sources
  • 600/mm and 1800/mm diffraction gratings


  • Graphene and 2D materials, polymers and monomers, inorganics and metal oxides, ceramics, coatings and thin films, photovoltaics, catalysts.
  • Active pharmaceutical ingredients and excipients mapping and characterization, polymorph identification, phase determination.
  • Disease diagnosis, dermatology, cell screening, cosmetics, microbiology, protein investigations, and drug interactions.
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Omicron STM-1 scanner

  • 2 μm x-y range
  • 20-50 pA min current

RHK SPM 1000 controller

  • 10 channel input
  • 26-bit resolution
  • complete signal access

Vacuum capability

  • 10-8 mtorr


  • LEED, sample annealing, lock-in amplifiers, optical excitation

Applications: Atomically resolved imaging, density of states/bandgap analysis, photon-stimulated electrical properties, and nano-gap electrodes

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Probe Station

Probe arms

  • 4 × 0-1GHz
  • 2 × 1-20 GHz


  • 10-6 torr

Lockin amplifiers

  • SRS 830, SRS 844

Impedance analyzer

  • Agilent E5061B 5Hz-3GHz

Network analyzer

  • Agilent N5230C 10MHz-20GHz

Temperature Range

  • LHe-100 °C


  • Kiethley 6517A

Function generators

  • SRS DS345 30MHz

Programming interface

  • Labview

Applications: Conductance, resistance, impedance, capacitance measurements of circuits, devices, and resonators.

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AFM scanners

  • 1μm, 10μm, and 100μm x-y range, 7μm z-range
  • 491, 532, and 660 nm laser sources

Optical heads

  • 0.7 NA 100× upright air lens
  • 1.3 NA 100× inverted oil immersion lens

Confocal Raman

  • Adjustable pinhole size and objective lens alignment


  • 1800, 600, and 150/mm gratings and 75/mm Echele. Cooled CCD/EMCCD detector.

AFM modes

  • Contact, tapping, force mapping, Kelvin probe, conductive AFM, lateral force. Tuning fork AFM allows custom-cut and etched metal probes.

Environmental control

  • Enclosures for each scanner for gas purge. Heated sample stage, fluid cell.

Simultaneous AFM/Raman

  • Keeps samples of varying topography in focus

Near Field Scanning Optical Microscopy (NSOM)

  • AFM-aperture optical microscopy is available in transmission mode

Applications: Simultaneous chemical and topographic/mechanical analysis. In situ temperature measurement. AFM-aperture optical microscopy. Optical devices such as semiconductor lasers, waveguides, and plasmonic devices Investigation of cellular tissue, DNA, viruses and other biological objects. Nanotubes, nanowires, and quantum dots.

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Modes available

  • Contact, AC (tapping) and dual AC, 1-D forces, lateral force, nanolithography, electrostatic force, Kelvin probe, conductive AFM, magnetic force, piezoelectric force, thermal AFM

Applications: Mechanics of cells, tissues, and polymers. Tagging and identification of cells, proteins, and molecules. Controlled dosing of samples via micropipette. Controlled environment (fluid, temperature) experiments.

Scan range

  • 90μm × 90μm × 15 μm closed loop

Z noise

  • <0.06nm 0.1Hz-1kHz BW

Cantilever noise

  • <0.02nm Adev, 0.1Hz-1kHz BW


  • Micromanipulator, nano-injector
  • Temperature-controlled chamber
  • Environmental fluid cell

Bio prep-space

  • CO2 incubator, Bio-safety cabinet


  • 641, 532, 488 nm lasers
  • Cascade II EMCCD camera with dual view filter
  • Nikon inverted optical microscope
  • 10×, 20×, 40×, 100× objectives


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Scan range

  • 10 μm x 10 μm x 1.5 μm

Z – resolution 0.01 nm

  • 01 nm

Tunneling current:

  • < 1pA – 330 nA

Gap voltage

  • ± 5 mV to ± 10 V; applied to tip/cantilever, sample grounded

Vacuum achievable:

  • 10-11 mbar or better

Sample size

  • 3mm x 9mm 7mm diameter

Temp range

  • 100K – 1500 K

Imaging modes

  • Contact, tapping, and FM noncontact


  • LEED, Auger electron spectroscopy
  • Evaporator, leak valves for controlled gas environment, sputter gun


  • 20-bit, <25μV noise @ 60kHz up to 24 data acquisition signals

Applications: Atomically-resolved imaging of surfaces. Surface reconstruction. Friction and adhesion measurements. Surface potential and conductive AFM. Scanning Gate Microscopy. Scanning Kelvin Probe + Local dielectric AFM.

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Property Measurement Group / Instrumentation

This is the first of two PPMS systems in the facility. It provides magnetic field up to 9 T and temperatures from 1.7 K to 400 K. Users are able to perform DC magnetic moment, AC magnetic susceptibility, 2- and 4-wire magnetoresistance, photoconductivity, and Hall effect.

This system benefits from the PPMS EverCool-II™ dewar, which is the second generation of low-loss dewars with integrated Helium liquefier for the PPMS system from Quantum Design. It allows the continuous operation of the PPMS System without the supply with liquid Helium. The system is cryogen free for the user, and can hold temperatures below 2 K indefinitely.


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This is second of two PPMS systems in the facility. It provides magnetic field up to 9 T and temperatures from 1.7 K to 400 K. Users are able to perform 2- and 4-wire magnetoresistance, thermal conductivity, heat capacity, Seebeck coefficient, and Hall effect measurements. The system is equipped with a turbo pump for the sample chamber.

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Quantum Design’s MPMS-XL provides sensitive SQUID (Superconducting QUantum Interference Device) magnetometry capabilities using Quantum Design’s Reciprocating Sample Option (RSO). In practice, we observe a noise floor of <10-8 emu for DC moment measurements. The system provides magnetic fields up to 7 Tesla and temperatures nominally between 2 K and 400 K. The MPMS has a fiber insert that permits studies of optically pumped magnetization, and an oven option that allows measurements up to 800 K when special needs arise.

MPMS XL Features

  • Cryogen Free with EverCool®
  • SQUID Sensitivity
  • Multiple Measurement Modes
    (Including Traditional MPMS DC Scan)
  • Temperature Range: 1.8 – 400K
  • 7 Tesla Magnet


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The TriVista system is a triple spectrometer that has multiple input and detection ports that we can configure to provide Raman scattering down to 5 cm-1, photoluminescence excitation/emission spectral mapping, absorption, as well as spatial imaging of Raman scattering or photoluminescence with an infinitely tunable (in width and center wavelength) bandpass filter from 350 nm to 1000 nm. For Raman scattering, the system can operate in either additive mode for high resolution experiments or in subtractive mode for extreme stray light rejection. The system has both Si and InGaAs detectors, providing detection bandwidth from 350 nm to 1.7 microns. Light sources include a Xenon lamp (from which any spectral range can be selected without altering the illumination profile) and a laser at 532 nm. We are able to measure samples on solid substrates and liquids within cuvettes.


  • Princeton Instruments Tri-Vista 555 spectrometer (9 gratings)
  • Princeton Instruments PIXIS-256E Si 2D array detector
  • Princeton Instruments OMA-V InGaAs linear array detector
  • Custom Optical Systems for Absorbance, Photoluminescence and Raman Scattering.
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