Equipment/Instrumentation

Ovens and Hotplate Towers

Ovens and Hotplate Towers

Each hot plate tower in QNF is outfitted with digital thermal hot plates that can be heated to 350C with controlled ramping. In addition, there are stainless steel gravity convection ovens capable of heating to 300C in each tower as well. Several baking stations are located throughout the QNF, each dedicated to specific resist process and polymer curing.

Ovens and Hotplate Towers