The Quattrone Nanofabrication Facility supports nanoelectronics, nanomaterials development and integration, soft matter, microfluidics and MEMS/NEMS.
QNF resides in the Krishna P. Singh Center for Nanotechnology. By providing core nanofabrication capabilities, our mission is to enable research and development in a number of areas. As embodied in the Penn Compact, QNF focuses on increased access, as well as integrating knowledge by engaging the Greater Philadelphia Region and far beyond. Our core endeavors are to support teaching, research, service and commercialization at the micro- and nanoscale.
QNF staff operates a 10,000sq.ft. cleanroom with leading-edge equipment capable of electron-beam and optical lithography, physical and chemical vapor deposition, dry and wet processing, metrology, and device characterization. In addition, a complimentary facility for soft materials and laser micromachining is maintained by QNF for diverse materials processing, microfluidics and lab-on-chip activities. For device packaging and hybridization, there is a suite of backend equipment available for wirebonding, wafer bonding, electrical testing and wafer dicing.
Interim Director and Soft Lithography Manager
As program manager, Eric handles new user orientation, outside user contracts, outside user agreements, coordination of user training, as well as any issues with billing.
As soft lithography manager, he provides complete user training in the fabrication of soft lithography and microfluidic devices. This includes mask design, proper spin coating technique, photolithography, and device assembly.
Lithography & Advanced Processing
Quattrone Nanofabrication Facility
David Barth is responsible for lithography, process integration, and new process development in the QNF. His background includes nanophotonic device fabrication, electron beam lithography, and process support on a variety of fabrication tools and techniques. He has a Ph.D. from UC Berkeley and a B.E. and M.E. from Stevens Institute of Technology in Mechanical Engineering.
Kyle Keenan is the Laboratory Manager for the Quattrone Nanofabrication Facility. His main responsibilities are cleanroom processing equipment health and optimization, oversight of new equipment installation and qualification, as well as day-to-day operations. Prior to joining Penn, Kyle worked at MIT Lincoln Laboratory as a photolithography and metrology specialist, and at Alpha Industries (now Skyworks, Inc.) as a process engineering assistant. He has a BA in Philosophy from Assumption College in Worcester, MA, and has been working in nanotechnology for more than 25 years.
Purchasing and Micro Contamination Manager,
Working Group Chair, Vendor Relations, (NNCI)
Charles R. Veith is a Member of Technical Staff in the Quattrone Nanofabrication Facility. His main responsibilities are owner and manager of all wet process infrastructure, designing, building and implementing comprehensive seamless low cost research material sourcing as well as supporting facilities and lead efforts to sustain and improve clean room quality. Prior to joining Penn, Charlie held positions at Intel Corporation and Digital Equipment Corporation. Charlie has a BA in Economics and Technical in Lean Implementation. Charlie’s has had a well recognized twenty-seven plus year career in semiconductor processing, materials, safety, finance, facilities, lean and educational outreach.
Graduate Student Fellows Program Manager
Gyuseok Kim is a principal scientist at the Singh Center for Nanotechnology at the University of Pennsylvania. He is an instructor of ESE 536 and ESAP Nanotechnology courses. He also manages the graduate student fellow program that is designed to give Master’s students hands-on processing experiences through the fabrication of devices. Prior to joining Singh Center, he worked at Penn as a postdoctoral fellow, at Samsung Electro-Mechanics as a senior engineer, and at Helmholtz-Zentrum Geesthacht in Germany as a research assistant. He received a Ph.D. from Grenoble INP in France in 2011, MS and BS from Seoul National University in South Korea in 2005 and 2007.
Senior Nanofabrication Engineer
David J. Jones is a member of technical staff in the Quattrone Nanofabrication Facility. His main responsibilities are process development & characterization, remote & internal user processing support and training QNF users on QNF equipment. He has a BS in Chemical Engineering from Clarkson University.
Mohsen (Sam) Azadi
Mohsen Azadi is a Principal Scientist at Singh Center for Nanotechnology at the University of Pennsylvania. He is responsible for research support and process development for the internal and external users at QNF. Prior to joining Singh Center, he was a PhD student at University of Pennsylvania working on micro and nanofabrication of MEMS/NEMS devices for photophoretic flight, Direct Energy conversion applications, and interstellar flight. He is a scientific and technical committee & editorial review board member at World Academy of Science, Engineering and Technology. He served as a member of the Dean’s Advisory Board in the School of Engineering and Applied Science from Dec 2019 to July 2021.
Jarrett is a member of the equipment engineering team at the QNF. His main role is maintaining equipment health, working with the process engineering team ensure our systems are operating optimally and minimizing tool downtime. He has a BS in Mechanical Engineering Technology from the Rochester Institute of Technology and has industry experiences at ThermoFisher Scientific and Levitech.