The Quattrone Nanofabrication Facility supports nanoelectronics, nanomaterials development and integration, soft matter, microfluidics and MEMS/NEMS.
QNF resides in the Krishna P. Singh Center for Nanotechnology. By providing core nanofabrication capabilities, our mission is to enable research and development in a number of areas. As embodied in the Penn Compact, QNF focuses on increased access, as well as integrating knowledge by engaging the Greater Philadelphia Region and far beyond. Our core endeavors are to support teaching, research, service and commercialization at the micro- and nanoscale.
QNF staff operates a 10,000sq.ft. cleanroom with leading-edge equipment capable of electron-beam and optical lithography, physical and chemical vapor deposition, dry and wet processing, metrology, and device characterization. In addition, a complimentary facility for soft materials and laser micromachining is maintained by QNF for diverse materials processing, microfluidics and lab-on-chip activities. For device packaging and hybridization, there is a suite of backend equipment available for wirebonding, wafer bonding, electrical testing and wafer dicing.
Professor and Associate Chair for Graduate Affairs
Mechanical Engineering and Applied Mechanics,
Faculty Director, Quattrone Nanofabrication Facility
Dr. Turner is the Faculty Director of the Quattrone Nanofabrication Facility. Turner’s research is primarily focused on nanoscale manufacturing, structured nanomaterials, and mechanics issues in MEMS and flexible devices.
Director, Nanofabrication Facility
Noah is responsible for day-to-day operations of the Quattrone cleanroom, including equipment procurement and establishing operating and safety procedures. He also manages associated technical staff, as well as developing and implementing advanced processing applications.
Kyle Keenan is the Laboratory Manager for the Quattrone Nanofabrication Facility. His main responsibilities are cleanroom processing equipment health and optimization, oversight of new equipment installation and qualification, as well as day-to-day operations. Prior to joining Penn, Kyle worked at MIT Lincoln Laboratory as a photolithography and metrology specialist, and at Alpha Industries (now Skyworks, Inc.) as a process engineering assistant. He has a BA in Philosophy from Assumption College in Worcester, MA, and has been working in nanotechnology for nearly 20 years.
Hiromichi Yamamoto, Ph.D.
Graduate Student Fellows Program Manager
Hiro is working on (1) technical user support on processes, (2) performance check, statistical process control, and documentation on the tools, and (3) development on a new nano-fabrication process.
Prior to joining QNF, He worked as Process Engineer at Xunlight in Ohio in 2008-2011, as Research Associate at George Washington University and Naval Research Laboratory of Washington DC in 2007-2008, as Postdoctoral Fellow at Naval Research Laboratory of Washington DC in 2003-2006, as Senior Researcher at Nippon Petrochemical in 1989-1995.
2002 PhD in Chemistry from University of Pittsburgh and 1989 Doctor of Science from The University of Tokyo (Institute for Molecular Science). MS in Electronics Engineering from University of Fukui.
Program Manager and Soft Lithography Manager
As program manager, Eric handles new user orientation, outside user contracts, outside user agreements, coordination of user training, as well as any issues with billing.
As soft lithography manager, he provides complete user training in the fabrication of soft lithography and microfluidic devices. This includes mask design, proper spin coating technique, photolithography, and device assembly.
Charles R. Veith is a Member of Technical Staff in the Quattrone Nanofabrication Facility. His main responsibilities are owner and manager of all wet process infrastructure, designing, building and implementing comprehensive seamless low cost research material sourcing as well as supporting facilities and lead efforts to sustain and improve clean room quality. Prior to joining Penn, Charlie held positions at Intel Corporation and Digital Equipment Corporation. Charlie has a BA in Economics and Technical in Lean Implementation. Charlie’s has had a well recognized twenty-seven plus year career in semiconductor processing, materials, safety, finance, facilities, lean and educational outreach.
Thin Film Area Manager
Meredith’s primary responsibilities include process support and optimization for the thin film deposition and etch areas at QNF, interfacing with researchers to ensure the success of their efforts, and the development of new process capabilities. Prior to joining the staff of QNF, Meredith was a member of the Technical staff at the CNF at Cornell University with a primary focus in thin film etching. His nearly 20 years of experience in nanotechnology encompasses the entire suite of process steps from CAD design and lithography, through thin film deposition and etch to metrology and characterization.
Gerald G. Lopez Ph.D.
Gyuseok is in charge of remote processing, development of advanced fabrication technique and characterization of device/material using electron microscopy. Prior to joining QNF, Gyuseok worked at Penn as a postdoctoral fellow, at Samsung as a senior engineer and at Helmholtz-Zentrum Geesthacht as a research assistant. He received the Ph.D from Grenoble INP in 2011 and MS from Seoul National University in 2007.