QNF SOPs

Tool ID Tool Name Tool Group Link
BE-01 EVG 510 Wafer Bonder Backend SOP
BE-02 EVG 620 Wafer Bond Aligner Backend SOP
BE-03 K&S Wire Bonder Backend SOP
BE-04 ADT 7100 Dicing Saw Backend SOP
BE-05 MPT Corp. RTP-600S Rapid Thermal Annealer Backend SOP
CPD-01 Tousimis Critical Point Dryer Backend SOP
INK-01 Dimatix ink-Jet Printer Backend SOP
ALD-01 Cambridge Nanotech S200 ALD Deposition SOP
CVD-01 Oxford PlasmaLab 100 PECVD Deposition SOP
CVD-02 A MRL Wet/Dry Thermal Oxide Deposition SOP
CVD-02 B MRL LPCVD Silicon Nitride Deposition SOP
CVD-02 C MRL Anneal 1 Deposition SOP
CVD-02 D MRL Anneal 2 Deposition SOP
PVD-01 Lesker Nano-36 Thermal Evaporator Deposition SOP
PVD-02 Lesker PVD75 E-Beam/Thermal Evaporator Deposition SOP
PVD-03 Lesker PVD75 DC/RF Sputterer Deposition SOP
PVD-04 Lesker PVD75 E-beam Evaporator Deposition SOP
PVD-05 Denton Explorer14 Magnetron Sputterer Deposition SOP
DE-02 Anatech SCE-108 Barrel Asher Dry Etch SOP
DE-03 SPTS Si DRIE Dry Etch SOP
DE-04 Oxford 80 Plus RIE Dry Etch SOP
DE-05 Oxford Cobra ICP Etcher Dry Etch SOP
DE-06 SPTS/Xactix XeF2 Isotropic Etcher Dry Etch SOP
DE-08 Jupiter II RIE Plasma Etcher Dry Etch SOP
MET-10 Zeiss Smartzoom5 2D/3D Optical Microscope Inspection SOP
MET-12 Zeiss Axio Imager M2m Microscope (1 of 4) Inspection SOP
MET-13 Zeiss Axio Imager M2m Microscope (2 of 4) Inspection SOP
MET-14 Zeiss Axio Imager M2m Microscope (3 of 4) Inspection SOP
MET-15 Zeiss Axio Imager M2m Microscope (4 of 4) Inspection SOP
EBL-01 Elionix ELS-7500EX E-Beam Lithography System Lithography SOP
LW-01 Heidelberg DWL 66+ Laser Writer Lithography SOP
LW-02 Nanoscribe Photonic Professional GT Lithography SOP
MA-01 SUSS MicroTec MA6 Gen3 Mask Aligner Lithography SOP
MA-02 Nanonex NX2600 Nanoimprint/Mask Aligner Lithography SOP
RC-01 SUSS MicroTec AS8 AltaSpray Lithography SOP
MET-01 KLA Tencor P7 2D profilometer Metrology SOP
MET-02 KLA Tencor P7 2D&3D/stress profilometer Metrology SOP
MET-03 Filmetrics F50 (yellow light) Metrology SOP
MET-04 Filmetrics F40 Metrology SOP
MET-05 Zygo NewView 7300 Optical Profilometer Metrology SOP
MET-06 Woollam VAS Ellipsometer Metrology SOP
MET-09 Micromanipulator 4060 Probe Station Metrology SOP
MET-11 Filmetrics F50 (white light) Metrology SOP
SPN-01 Spinner – Positive Resist (Left) – 4″ Wafer Only Spinners SOP
SPN-03 Spinner – Positive Resist (Right) – Small Piece Only Spinners SOP
SPN-04 Spinner – Negative Resist (Left) Spinners SOP
SPN-05 Spinner – Negative Resist (Right) Spinners SOP
SPN-06 Spinner – E-Beam Resist Only Spinners SOP
SRD-01 Spin Rinse Dryer Wet Bench SOP
WB-06 Hydrofluoric (HF) Acid Process Wet Bench SOP
Benches – general Wet Bench SOP
LMM-01 IPG IX-255 Excimer Laser Micromachining Laser Micromachining SOP
LMM-02 IPG IX280-DXF Green Laser Micromachining Laser Micromachining SOP
DE-07 Anatech SCE-106 Barrel Asher Soft Lithography SOP
MA-03 ABM3000HR Mask Aligner Soft Lithography SOP
PVD-07 SCS PDS2010 Parylene Coater Soft Lithography SOP