| Tool ID |
Tool Name |
Tool Group |
Link |
| BE-01 |
EVG 510 Wafer Bonder |
Backend |
SOP |
| BE-02 |
EVG 620 Wafer Bond Aligner |
Backend |
SOP |
| BE-03 |
K&S Wire Bonder |
Backend |
SOP |
| BE-04 |
ADT 7100 Dicing Saw |
Backend |
SOP |
| BE-05 |
MPT Corp. RTP-600S Rapid Thermal Annealer |
Backend |
SOP |
| CPD-01 |
Tousimis Critical Point Dryer |
Backend |
SOP |
| ALD-01 |
Cambridge Nanotech S200 ALD |
Deposition |
SOP |
| CVD-01 |
Oxford PlasmaLab 100 PECVD |
Deposition |
SOP |
| CVD-02 A |
MRL Wet/Dry Thermal Oxide |
Deposition |
SOP |
| CVD-02 B |
MRL LPCVD Silicon Nitride |
Deposition |
SOP |
| CVD-02 C |
MRL Anneal 1 |
Deposition |
SOP |
| CVD-02 D |
MRL Anneal 2 |
Deposition |
SOP |
| PVD-01 |
Lesker Nano-36 Thermal Evaporator |
Deposition |
SOP |
| PVD-02 |
Lesker PVD75 E-Beam/Thermal Evaporator |
Deposition |
SOP |
| PVD-03 |
Lesker PVD75 DC/RF Sputterer |
Deposition |
SOP |
| PVD-04 |
Lesker PVD75 E-beam Evaporator |
Deposition |
SOP |
| PVD-05 |
Denton Explorer14 Magnetron Sputterer |
Deposition |
SOP |
| DE-02 |
Anatech SCE-108 Barrel Asher |
Dry Etch |
SOP |
| DE-03 |
SPTS Si DRIE |
Dry Etch |
SOP |
| DE-04 |
Oxford 80 Plus RIE |
Dry Etch |
SOP |
| DE-05 |
Oxford Cobra ICP Etcher |
Dry Etch |
SOP |
| DE-06 |
SPTS/Xactix XeF2 Isotropic Etcher |
Dry Etch |
SOP |
| DE-08 |
Jupiter II RIE Plasma Etcher |
Dry Etch |
SOP |
| MET-10 |
Zeiss Smartzoom5 2D/3D Optical Microscope |
Inspection |
SOP |
| MET-12 |
Zeiss Axio Imager M2m Microscope (1 of 4) |
Inspection |
SOP |
| MET-13 |
Zeiss Axio Imager M2m Microscope (2 of 4) |
Inspection |
SOP |
| MET-14 |
Zeiss Axio Imager M2m Microscope (3 of 4) |
Inspection |
SOP |
| MET-15 |
Zeiss Axio Imager M2m Microscope (4 of 4) |
Inspection |
SOP |
| EBL-01 |
Elionix ELS-7500EX E-Beam Lithography System |
Lithography |
SOP |
| LW-01 |
Heidelberg DWL 66+ Laser Writer |
Lithography |
SOP |
| LW-02 |
Nanoscribe Photonic Professional GT |
Lithography |
SOP |
| MA-01 |
SUSS MicroTec MA6 Gen3 Mask Aligner |
Lithography |
SOP |
| MA-02 |
Nanonex NX2600 Nanoimprint/Mask Aligner |
Lithography |
SOP |
| RC-01 |
SUSS MicroTec AS8 AltaSpray |
Lithography |
SOP |
| MET-01 |
KLA Tencor P7 2D profilometer |
Metrology |
SOP |
| MET-02 |
KLA Tencor P7 2D&3D/stress profilometer |
Metrology |
SOP |
| MET-03 |
Filmetrics F50 (yellow light) |
Metrology |
SOP |
| MET-04 |
Filmetrics F40 |
Metrology |
SOP |
| MET-05 |
Zygo NewView 7300 Optical Profilometer |
Metrology |
SOP |
| MET-06 |
Woollam VAS Ellipsometer |
Metrology |
SOP |
| MET-09 |
Micromanipulator 4060 Probe Station |
Metrology |
SOP |
| MET-11 |
Filmetrics F50 (white light) |
Metrology |
SOP |
| SPN-01 |
Spinner – Positive Resist (Left) – 4″ Wafer Only |
Spinners |
SOP |
| SPN-03 |
Spinner – Positive Resist (Right) – Small Piece Only |
Spinners |
SOP |
| SPN-04 |
Spinner – Negative Resist (Left) |
Spinners |
SOP |
| SPN-05 |
Spinner – Negative Resist (Right) |
Spinners |
SOP |
| SPN-06 |
Spinner – E-Beam Resist Only |
Spinners |
SOP |
| SRD-01 |
Spin Rinse Dryer |
Wet Bench |
SOP |
| WB-06 |
Hydrofluoric (HF) Acid Process |
Wet Bench |
SOP |
| – |
Benches – general |
Wet Bench |
SOP |
| LMM-01 |
IPG IX-255 Excimer Laser Micromachining |
Laser Micromachining |
SOP |
| LMM-02 |
IPG IX280-DXF Green Laser Micromachining |
Laser Micromachining |
SOP |
| DE-07 |
Anatech SCE-106 Barrel Asher |
Soft Lithography |
SOP |
| MA-03 |
ABM3000HR Mask Aligner |
Soft Lithography |
SOP |
| PVD-07 |
SCS PDS2010 Parylene Coater |
Soft Lithography |
SOP |
