Equipment/Instrumentation

Denton Explorer 14

Denton Explorer 14

  • Open load system in sputter-down configuration
  • Two DC guns
  • Able to co-sputter one DC and one RF source
  • One RF gun
  • Cryo pumped with automated interface
  • Automated control of film thickness
  • Pieces through 150mm wafers
  • Wafer platen rotation with cooling
  • Substrate cleaning
Denton Explorer 14