Equipment/Instrumentation

Kurt J. Lesker PVD 75 – E-Beam/Thermal Evaporator

Kurt J. Lesker PVD 75 – E-Beam/Thermal Evaporator

  • Two thermal sources
  • Four pocket e-beam at 10kV
  • Cryo pumped with automated interface
  • Automated control of film thickness
  • Pieces through 150mm wafers
  • Wafer platen rotation with cooling stage
Kurt J. Lesker PVD 75 – E-Beam/Thermal Evaporator