Kurt J. Lesker PVD 75 – E-Beam/Thermal Evaporator
Kurt J. Lesker PVD 75 – E-Beam/Thermal Evaporator
TOOL ID: PVD-02
- Two thermal sources
- Four pocket e-beam at 10kV
- Cryo pumped with automated interface
- Automated control of film thickness
- Pieces through 150mm wafers
- Wafer platen rotation with cooling stage
Kurt J. Lesker PVD 75 – E-Beam/Thermal Evaporator
