Equipment/Instrumentation

SUSS MicroTec MA-6

 

SUSS MicroTec MA-6

The Dedicated Solution for Industrial Research and Operator Assisted Alignment

Designed for R&D, pilot line and production environments, the MA/BA6 Gen3 enables production-friendly research. It allows easy and cost effective process transfer from laboratory to production. Key components such as high resolution optics, precise alignment system and graphical user interface perfectly match with the SUSS production aligner platform.

  • High resolution (HR) optics allows patterning of structures below 0.5μm
  • Operator assisted and auto alignment permits down to 0.25μm alignment accuracy
  • Advanced automatic functions for maximum process control
  • Process compatibility with automatic equipment
  • Optimized split field microscope with direct viewing and/or LCD flat screen options
  • Allows utilization of tool sets from the previous MA/BA6 platform
  • Pieces through 150mm wafers.

 

SUSS MicroTec MA-6