Bruker Icon AFM
Bruker Icon AFM
AFM modes
- PeakForce (with quantitative nanomechanics), tapping, contact, lateral force, magnetic force spectroscopy, Kelvin probe, conductive AFM, tunneling AFM, electrostatic force, magnetic force, piezoelectric force, torsional resonance mode.
Applications: Nano-mechanics, whole-wafer inspection, scanning conductivity/resistance microscopy. Thermal AFM. Electrical measurements of soft materials. Fluid tipholder.
X-Y scan range
- 90μm × 90 μm × 10 μm
Vertical noise floor
- <30 pm RMS
Current sensitivity
- pA to μA
Motorized position stage (X-Y axis)
- 180mm × 150mm
- 210mm vacuum chuck
Bruker Icon AFM
