Kurt J. Lesker Nano 36 Thermal Evaporator
Kurt J. Lesker Nano 36 Thermal Evaporator
TOOL ID: PVD-01
- Four thermal sources
- Quick turbo pumping automated interface
- Automated control of film thickness
- Pieces through 150mm wafers
- Wafer platen rotation
![](https://www.nano.upenn.edu/wp-content/uploads/2022/03/PVD-01-scaled.jpeg)
Kurt J. Lesker Nano 36 Thermal Evaporator