Equipment/Instrumentation

Kurt J. Lesker Nano 36 Thermal Evaporator

Kurt J. Lesker Nano 36 Thermal Evaporator

  • Four thermal sources
  • Quick turbo pumping automated interface
  • Automated control of film thickness
  • Pieces through 150mm wafers
  • Wafer platen rotation
Kurt J. Lesker Nano 36 Thermal Evaporator