Anatech SCE-108 Barrel Asher
Anatech SCE 108 Barrel Asher
TOOL ID: DE-02
Anatech USA’s SCE-100 Series Inductively Coupled (ICP) Plasma systems are extremely effective for a Plasma Ashing process to activate a surface prior to bonding PDMS, e.g.
Process gases is O2. Sample sizes are pieces to 100mm round wafers.