JA Woollam V VASE Ellipsometer

J.A. Woollam V VASE Spectroscopic Ellipsometer


The VASE is one of the most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more.

It combines high accuracy and precision with a wide spectral range up to 300 to 1100nm. Variable wavelength and angle of incidence allow flexible measurement capabilities including:

  • Reflection and Transmission Ellipsometry
  • Generalized Ellipsometry
  • Reflectance (R) intensity
  • Transmittance (T) intensity
  • Cross-polarized R/T
  • Depolarization
  • Scatterometry
  • Mueller-matrix
JA Woollam V VASE Ellipsometer