Equipment/Instrumentation

Lucas Labs 4PP

 

Lucas Labs Four Point Probe (4PP)

  • Wafer sizes from pieces to 150mm
  • Manual system that combines with a current source and electronic DVM combined
  • Accuracy of better than 1% over the resistivity range from 1 milli-ohm to 2 Meg-ohms per square.
  • Simple to perform sheet and bulk resistivity measurements
Lucas Labs 4PP