Anatech SCE-106 Barrel Asher
Anatech SCE 106 Barrel Asher
TOOL ID: DE-07
Anatech USA’s SCE-100 Series Inductively Coupled (ICP) Plasma systems are extremely effective for a Plasma Ashing process to remove organics prior to thin film deposition and/or chemical analysis of remaining inorganics.
Process gases are CF4, O2, Ar and N2. Sample sizes are pieces to 150mm round wafers.