Evatec Clusterline 200 II Sputter
Evatec Clusterline 200 II Sputter
TOOL ID: PVD-06
The system is owned and managed by the Olsson Group at UPenn. Inquiries into using the system should be made to staff via an email at qnf-process@lists.seas.upenn.edu .
The tool is configured to sputterer piezo-electric materials, including Al and Sc.
Evatec Clusterline 200 II Sputter
