Equipment/Instrumentation

Spinner and Solvent Processing Benches

Spinner and Solvent Processing Benches

SU-8/PDMS Resist Spinner

TOOL ID: SPN-07

  • Maximum speed of 10,000 rpm
  • User friendly programmable interface
  • Programmable step functions (up to 10 steps per recipe)
  • Programmable process control
  • Wafer sizes from pieces through 150mm
Spinner and Solvent Processing Benches