Ultratech Fiji G2 ALD
Ultratech Fiji G2 ALD
TOOL ID: ALD-02
The system is owned and managed by the Detsi Group at UPenn. Inquiries into using the system should be made to staff via an email at qnf-process@lists.seas.upenn.edu .
The tool is configured with the following precursors: Manganese, TMA, TMP, Zinc, Lithium
Ultratech Fiji G2 ALD
