Resist Spinners

Resist and Polymer Spinners

The QNF maintains several resist and polymer spinners throughout the cleanroom. Each spinner is dedicated to specific resist and polymer types to reduce cross contamination.

  • Maximum speed of 10,000 rpm
  • User friendly programmable interface
  • Programmable step functions (up to 10 steps per recipe)
  • Programmable process control
  • Wafer sizes from pieces through 150mm
Resist Spinners