Equipment/Instrumentation

KLA Tencor P7 2 Profilometer

 

KLA 3D Profilometer

The P-7 stylus profiler offers industry leading measurement repeatability for reliable measurement performance. The surface measurement system has 150 mm scan length standard – the only stylus profiler on the market to offer long scan capability without the need for stitching. The UltraLite® sensor includes dynamic force control, excellent linearity, and the highest vertical resolution making it the best sensor available on a surface measurement system. Finally, this stylus profiler’s surface measurement system includes point-and-click operation and the productivity package to offer the easiest to use tool on the market with the features required by university, R&D, and production environments.

The P-7 Stylus profiler is capable of addressing a wide range of surface measurements and applications:

  • Thin film step height measurements
  • Thick film step height measurements
  • Photo resist / soft films
  • Etched trench depth
  • Materials characterization for surface roughness and waviness
  • Surface curvature and form
  • 2D stress of thin films
  • Dimensional analysis and surface texture
  • 3D imaging of various surfaces
  • Flatness or curvature
  • Defect review and defect analysis

 

KLA Tencor P7 2 Profilometer