Quanta 600 FEG ESEM
Quanta 600 FEG ESEM
An FEI Quanta 600 FEG Mark II Environmental Scanning Electron Microscope achieves 1.5 nm resolution in ESEM mode and can be operated under a range of gaseous environments from 6 x 10-4 Pa to ~1000 Pa. It is equipped with a special wet STEM detector that is ideal for the imaging of nanoparticles in biological systems. This system is our platform for in-situ electron microscopy development with heating and cooling stages allowing imaging from 20-1000°C, dual Kleindiek nano-manipulators with a micro-droplet injection system for electrical and mechanical measurements, and gas injection systems for platinum and gold e-beam deposition. The Quanta SEM is equipped with a unique array of accessories to enable the combination of high-resolution imaging and nanoscale manipulation allowing for powerful in-situ experiments involving controlled stimuli and correlated response. An EDAX Energy Dispersive x-ray spectrometer (EDS) allows for chemical characterization via spectra, element mapping, or phase mapping, and an electron backscatter diffraction detector (EBSD) is available for characterization of crystallographic structures. In-situ capabilities include: nanoscale manipulation of specimen or probe, access to the large sample volume by fluids, gases, electrical, optical and mechanical probes; detection of sample response to such probes, including the electron beam itself; and the temperature dependences of all these phenomena.
