Nanonex NX2600 Nanoimprinter
Nanonex 2600 Nanoimprinter
TOOL ID: MA-02
The Nanonex NX-2600 is a full wafer nanoimprinter. It is capable of all imprint forms: thermal, photo-curable, and embossing, with sub-5nm imprinting resolution and sub-1 micrometer alignment accuracy. Based on the Nanonex unique patented Air Cushion PressTM technology, the NX-2600 offers unsurpassed uniformity regardless of backside topology, wafer or mask flatness, or backside contamination. This ACP technology also eliminates lateral shifting between the mask and substrate, which significantly increases mask lifetime.
Standard nanoimprint resists are provided.