| ADT 7122 Dicing Saw | 25.00 | 25.00 | 25.00 | 75.00 |
| Anatech SCE-106 Barrel Asher | 25.00 | 25.00 | 25.00 | 75.00 |
| Cambridge Nanotech S200 ALD | 25.00 | 25.00 | 25.00 | 75.00 |
| Denton Explorer14 Magnetron Sputterer | 25.00 | 25.00 | 25.00 | 75.00 |
| Dimatix ink-Jet Printer | 0.00 | 0.00 | 0.00 | 0.00 |
| Elionix ELS-7500EX E-Beam Lithography System | 50.00 | 50.00 | 50.00 | 150.00 |
| Evatec Clusterline 200 II | 25.00 | 25.00 | 25.00 | 75.00 |
| EVG 510 Wafer Bonder | 25.00 | 25.00 | 25.00 | 75.00 |
| EVG 620 Wafer Bond Aligner | 25.00 | 25.00 | 25.00 | 75.00 |
| Filmetrics F40 | 15.00 | 15.00 | 15.00 | 45.00 |
| Filmetrics F50 (white light) | 15.00 | 15.00 | 15.00 | 45.00 |
| Filmetrics F50 (yellow light) | 15.00 | 15.00 | 15.00 | 45.00 |
| Filmetrics Profilm3D | 15.00 | 15.00 | 15.00 | 45.00 |
| Four Point Probe | 15.00 | 15.00 | 15.00 | 45.00 |
| Genesis HMDS Vapor Prime Oven | 25.00 | 25.00 | 25.00 | 80.00 |
| Heidelberg DWL 66+ Laser Writer | 25.00 | 25.00 | 25.00 | 75.00 |
| Hydrofluoric (HF) Acid Process | 0.00 | 0.00 | 0.00 | 0.00 |
| Jandel Multi Height Four Point Probe | 15.00 | 15.00 | 15.00 | 45.00 |
| Jupiter II RIE Plasma Etcher | 25.00 | 25.00 | 25.00 | 75.00 |
| K&S Wire Bonder | 25.00 | 25.00 | 25.00 | 75.00 |
| KLA Tencor P7 2D profilometer | 15.00 | 15.00 | 15.00 | 45.00 |
| KLA Tencor P7 2D&3D/stress profilometer | 15.00 | 15.00 | 15.00 | 45.00 |
| Lesker Nano-36 Thermal Evaporator | 25.00 | 25.00 | 25.00 | 75.00 |
| Lesker PVD75 DC/RF Sputterer | 25.00 | 25.00 | 25.00 | 75.00 |
| Lesker PVD75 E-beam Evaporator | 25.00 | 25.00 | 25.00 | 75.00 |
| Lesker PVD75 E-Beam/Thermal Evaporator | 25.00 | 25.00 | 25.00 | 75.00 |
| Lift-off Process | 0.00 | 0.00 | 0.00 | 0.00 |
| Litho Workstation for BEAMER and TRACER | 50.00 | 50.00 | 50.00 | 150.00 |
| LRSM Wet Oxidation Furnace | | 100.00 | | 100.00 |
| Micromanipulator 4060 Probe Station | 15.00 | 15.00 | 15.00 | 45.00 |
| MPT Corp. RTP-600S Rapid Thermal Annealer | 25.00 | 25.00 | 25.00 | 75.00 |
| MRL Anneal 1 | 25.00 | 25.00 | 25.00 | 75.00 |
| MRL Anneal 2 | 25.00 | 25.00 | 25.00 | 75.00 |
| MRL LPCVD Silicon Nitride | 25.00 | 25.00 | 25.00 | 75.00 |
| MRL Wet/Dry Thermal Oxide | 25.00 | 25.00 | 25.00 | 75.00 |
| Nanonex NX2600 Nanoimprint | 25.00 | 25.00 | 25.00 | 75.00 |
| Nanoscribe Photonic Professional GT | 25.00 | 25.00 | 25.00 | 75.00 |
| Oxford 80 Plus RIE | 25.00 | 25.00 | 25.00 | 75.00 |
| Oxford Cobra ICP Etcher | 40.00 | 40.00 | 40.00 | 75.00 |
| Oxford PlasmaLab 100 PECVD | 25.00 | 25.00 | 25.00 | 75.00 |
| RENA Compass SRD | 0.00 | 0.00 | 0.00 | 0.00 |
| Rudolph Ellipsometer | 15.00 | 15.00 | 15.00 | 45.00 |
| SMI MOCVD, Horizontal & Vertical Reactors | 25.00 | 25.00 | 25.00 | 80.00 |
| SMI MOCVD, Vertical Reactor | 25.00 | 25.00 | 25.00 | 80.00 |
| Solvent Chemistry Process | 0.00 | 0.00 | 0.00 | 0.00 |
| Spinner - E-Beam Resist Only | 0.00 | 0.00 | 0.00 | 0.00 |
| Spinner - Negative Resist (Left) | 0.00 | 0.00 | 0.00 | 0.00 |
| Spinner - Negative Resist (Right) | 0.00 | 0.00 | 0.00 | 0.00 |
| Spinner - Positive Resist (Center) - 4" Wafer Only | 0.00 | 0.00 | 0.00 | 0.00 |
| Spinner - Positive Resist (Left) | 0.00 | 0.00 | 0.00 | 0.00 |
| Spinner - Positive Resist (Right) - Small Piece Only | 0.00 | 0.00 | 0.00 | 0.00 |
| SPTS Si DRIE | 25.00 | 25.00 | 25.00 | 75.00 |
| SPTS/Xactix XeF2 Isotropic Etcher | 25.00 | 25.00 | 25.00 | 75.00 |
| SUSS MicroTec AS8 AltaSpray | 40.00 | 40.00 | 40.00 | 64.00 |
| SUSS MicroTec MA6 Gen3 Mask Aligner | 25.00 | 25.00 | 25.00 | 75.00 |
| SUSS MicroTec SCIL (Substrate Conformal Imprint Lithography) System | 0.00 | 0.00 | 0.00 | 0.00 |
| Technics RIE | 25.00 | 25.00 | 25.00 | 75.00 |
| Tousimis Critical Point Dryer | 25.00 | 25.00 | 25.00 | 75.00 |
| TPT HB100 Wire Bonder | 25.00 | 25.00 | 25.00 | 75.00 |
| Ultratech Fiji G2 ALD | 25.00 | 25.00 | 25.00 | 75.00 |
| Veeco Savannah 200 | 25.00 | 25.00 | 25.00 | 75.00 |
| Woollam VAS Ellipsometer | 15.00 | 15.00 | 15.00 | 45.00 |
| YES 1224P HMDS/IR Oven | 25.00 | 25.00 | 25.00 | 75.00 |
| Zeiss Axio Imager M2m Microscope (1 of 4) | 0.00 | 0.00 | 0.00 | 0.00 |
| Zeiss Axio Imager M2m Microscope (2 of 4) | 0.00 | 0.00 | 0.00 | 0.00 |
| Zeiss Axio Imager M2m Microscope (3 of 4) | 0.00 | 0.00 | 0.00 | 0.00 |
| Zeiss Axio Imager M2m Microscope (4 of 4) | 0.00 | 0.00 | 0.00 | 0.00 |
| Zeiss Smartzoom5 2D/3D Optical Microscope | 0.00 | 0.00 | 0.00 | 0.00 |
| Zygo NewView 7300 Optical Profilometer | 15.00 | 15.00 | 15.00 | 45.00 |
