Tool Rates

Quattrone Nanofabrication Facility

ToolInternalExternal AcademicExternal GovernmentExternal Corporate
ADT 7122 Dicing Saw25.0025.0025.0075.00
Anatech SCE-106 Barrel Asher 25.0025.0025.0075.00
Cambridge Nanotech S200 ALD25.0025.0025.0075.00
Denton Explorer14 Magnetron Sputterer25.0025.0025.0075.00
Dimatix ink-Jet Printer0.000.000.000.00
Elionix ELS-7500EX E-Beam Lithography System50.0050.0050.00150.00
Evatec Clusterline 200 II25.0025.0025.0075.00
EVG 510 Wafer Bonder25.0025.0025.0075.00
EVG 620 Wafer Bond Aligner25.0025.0025.0075.00
Filmetrics F4015.0015.0015.0045.00
Filmetrics F50 (white light)15.0015.0015.0045.00
Filmetrics F50 (yellow light)15.0015.0015.0045.00
Filmetrics Profilm3D15.0015.0015.0045.00
Four Point Probe 15.0015.0015.0045.00
Genesis HMDS Vapor Prime Oven25.0025.0025.0080.00
Heidelberg DWL 66+ Laser Writer25.0025.0025.0075.00
Hydrofluoric (HF) Acid Process0.000.000.000.00
Jandel Multi Height Four Point Probe15.0015.0015.0045.00
Jupiter II RIE Plasma Etcher25.0025.0025.0075.00
K&S Wire Bonder25.0025.0025.0075.00
KLA Tencor P7 2D profilometer15.0015.0015.0045.00
KLA Tencor P7 2D&3D/stress profilometer 15.0015.0015.0045.00
Lesker Nano-36 Thermal Evaporator25.0025.0025.0075.00
Lesker PVD75 DC/RF Sputterer 25.0025.0025.0075.00
Lesker PVD75 E-beam Evaporator25.0025.0025.0075.00
Lesker PVD75 E-Beam/Thermal Evaporator 25.0025.0025.0075.00
Lift-off Process0.000.000.000.00
Litho Workstation for BEAMER and TRACER50.0050.0050.00150.00
LRSM Wet Oxidation Furnace100.00100.00
Micromanipulator 4060 Probe Station15.0015.0015.0045.00
MPT Corp. RTP-600S Rapid Thermal Annealer25.0025.0025.0075.00
MRL Anneal 125.0025.0025.0075.00
MRL Anneal 225.0025.0025.0075.00
MRL LPCVD Silicon Nitride25.0025.0025.0075.00
MRL Wet/Dry Thermal Oxide25.0025.0025.0075.00
Nanonex NX2600 Nanoimprint25.0025.0025.0075.00
Nanoscribe Photonic Professional GT25.0025.0025.0075.00
Oxford 80 Plus RIE25.0025.0025.0075.00
Oxford Cobra ICP Etcher40.0040.0040.0075.00
Oxford PlasmaLab 100 PECVD25.0025.0025.0075.00
RENA Compass SRD0.000.000.000.00
Rudolph Ellipsometer15.0015.0015.0045.00
SMI MOCVD, Horizontal & Vertical Reactors25.0025.0025.0080.00
SMI MOCVD, Vertical Reactor25.0025.0025.0080.00
Solvent Chemistry Process0.000.000.000.00
Spinner - E-Beam Resist Only0.000.000.000.00
Spinner - Negative Resist (Left)0.000.000.000.00
Spinner - Negative Resist (Right)0.000.000.000.00
Spinner - Positive Resist (Center) - 4" Wafer Only0.000.000.000.00
Spinner - Positive Resist (Left)0.000.000.000.00
Spinner - Positive Resist (Right) - Small Piece Only0.000.000.000.00
SPTS Si DRIE 25.0025.0025.0075.00
SPTS/Xactix XeF2 Isotropic Etcher25.0025.0025.0075.00
SUSS MicroTec AS8 AltaSpray40.0040.0040.0064.00
SUSS MicroTec MA6 Gen3 Mask Aligner25.0025.0025.0075.00
SUSS MicroTec SCIL (Substrate Conformal Imprint Lithography) System0.000.000.000.00
Technics RIE25.0025.0025.0075.00
Tousimis Critical Point Dryer25.0025.0025.0075.00
TPT HB100 Wire Bonder25.0025.0025.0075.00
Ultratech Fiji G2 ALD25.0025.0025.0075.00
Veeco Savannah 20025.0025.0025.0075.00
Woollam VAS Ellipsometer15.0015.0015.0045.00
YES 1224P HMDS/IR Oven25.0025.0025.0075.00
Zeiss Axio Imager M2m Microscope (1 of 4)0.000.000.000.00
Zeiss Axio Imager M2m Microscope (2 of 4)0.000.000.000.00
Zeiss Axio Imager M2m Microscope (3 of 4)0.000.000.000.00
Zeiss Axio Imager M2m Microscope (4 of 4)0.000.000.000.00
Zeiss Smartzoom5 2D/3D Optical Microscope0.000.000.000.00

QNF Soft Lithography

ToolInternalExternal AcademicExternal GovernmentExternal Corporate
ABM3000HR Mask Aligner25.0025.0025.0075.00
Anatech SCE-106 Barrel Asher 25.0025.0025.0075.00
Hotplate - WaferPlate (SL)0.000.000.000.00
IPG IX-255 Excimer Laser Micromachining25.0025.0025.0075.00
IPG IX280-DXF Green Laser Micromachining 25.0025.0025.0075.00
SCS PDS2010 Parylene Coater25.0025.0025.0075.00
Silanization Dessicator0.000.000.000.00
Spinner - SU-8/PDMS 0.000.000.000.00

Nanoscale Characterization Facility

ToolInternalExternal AcademicExternal GovernmentExternal Corporate
Cressington Sputter Coater10.0010.0010.0010.00
FEI Quanta 600 ESEM40.0040.0040.00240.00
JEOL 7500F HRSEM35.0035.0035.00210.00
JEOL F200 S/TEM50.0050.0050.00300.00
JEOL NEOARM S/TEM70.0070.0070.00420.00
Tescan S8252X Plasma FIB50.0050.0050.00300.00

Scanning and Local Probe Facility

ToolInternalExternal AcademicExternal GovernmentExternal Corporate
Asylum AFM30.0030.0030.00150.00
Bruker Icon AFM30.0030.0030.00150.00
Horiba confocal35.0035.0035.00150.00
PicoPlus AFM30.0030.0030.00150.00
Probe Station30.0030.0030.00150.00
Raman-NSOM35.0035.0035.00150.00
TIRF-AFM30.0030.0030.00150.00