MSE 465/565 Fabrication and Characterization of Nanodevices

This course surveys various processes that are used to produce materials structured at the micron and nanometer scales for electronic, optical and chemical applications. Basic principles of chemistry, physics, thermodynamics and surface/interfacial science are applied to solid state, liquid, and colloidal approaches to making materials. The approaches to nano- and microfabrication: photolithography, soft lithography, nanoimprint lithography, 3D printing and self-assembly, are covered. The course is heavily lab based, with 25% of class time and 30% of the homework devoted to hands on experiences. Lab assignments are a series of structured individual/group projects. Evaluation is based on 3-4 lab reports, 4 problem sets with journal paper reading assignment, and a final project design.