Spin 3
Positive Resist Spinner
- Three Spinners
- Maximum speed of 10,000 rpm
- User friendly programmable interface
- Programmable step functions (up to 10 steps per recipe)
- Programmable process control
- Wafer sizes from pieces through 150mm
![](https://www.nano.upenn.edu/wp-content/uploads/2017/09/SPN-04v2-300x225.jpg)
Spin 3