Equipment/Instrumentation

Kurt J. Lesker PVD 75 PRO-Line E-Beam Evaporator

Kurt J. Lesker PVD 75 PRO-Line E-Beam Evaporator

  • Load locked system
  • Four pocket e-beam at 10kV
  • Cryo pumped with automated interface
  • Automated control of film thickness
  • Pieces through 150mm wafers
  • Wafer platen rotation
Kurt J. Lesker PVD 75 PRO-Line E-Beam Evaporator