Kurt J. Lesker PVD 75 PRO-Line Sputterer
Kurt J. Lesker PVD 75 PRO-Line Sputterer
TOOL ID: PVD-03
- Load locked system
- Three DC guns
- Able to co-sputter two DC sources
- One RF gun
- Cryo pumped with automated interface
- Automated control of film thickness
- Pieces through 150mm wafers
- Wafer platen rotation with heating
Kurt J. Lesker PVD 75 PRO-Line Sputterer
