SCIL – Surface Conformal Imprint Lithography
Surface Conformal Imprint Lithography (SCIL)
The surface conformal imprint lithography (SCIL) system allows for sub-100nm imprinting of features. Using a hard master, a soft replica stamp is made using PDMS and flexible glass sheet. The result is a flexible stamp that readily conforms to existing substrate topography when imprinting atop a UV curable nano-imprint resist.
SCIL – Surface Conformal Imprint Lithography
