Equipment/Instrumentation

Rudolph

 

Rudolph Auto Ellipsometer VIS/NIR

This unit is Multi-Wavelength Ellipsometer with direct readout of thickness and refractive index of single and multi-layer films. The NIR-3 optics allows user to select 405nm, 633nm and 830nm. The longer wavelength option is ideal for plasma deposited films so they are rendered transparent.

Substrates up to 150mm

Wavelengths: 532, 633 and 808nm

Rudolph